Speaker
Dr
Gabriel Schaumann
(Technical University Darmstadt)
Description
Optical metrology is amenable to characterizing thin and fragile targets in terms of thickness and surface roughness distribution. This presentation will detail a measurement setup that relies on a known axial chromatic spread of a broad, incoherent light source. With two of these point confocal sensors, a coordinate measurement machine has been build to metrologize thin film and multi-layer targets of both transparent and non-transparent materials.
Primary author
Dr
Gabriel Schaumann
(Technical University Darmstadt)
Co-authors
Prof.
Markus Roth
(Technical University Darmstadt)
Mr
Nico Neumann
(Technical University Darmstadt)
Mr
Torsten Abel
(Technical University Darmstadt)
